05 Fakultät Informatik, Elektrotechnik und Informationstechnik
Permanent URI for this collectionhttps://elib.uni-stuttgart.de/handle/11682/6
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Item Open Access High‐performance MEMS shutter display with metal‐oxide thin‐film transistors and optimized MEMS element(2023) Al Nusayer, Sheikh Abdullah; Schalberger, Patrick; Baur, Holger; Kleber, Florian; Fruehauf, NorbertActive matrix prestressed microelectromechanical shutter displays enable outstanding optical properties as well as robust operating performance. The microelectromechanical systems (MEMS) shutter elements have been optimized for higher light outcoupling efficiency with lower operation voltage and higher pixel density. The MEMS elements have been co-fabricated with self-aligned metal-oxide thin-film transistors (TFTs). Several optimizations were required to integrate MEMS process without hampering the performance of both elements. The optimized display process requires only seven photolithographic masks with ensuring proper compatibility between MEMS shutter and metal-oxide TFT process.Item Open Access Printed chip interconnects for microLED displays(2025) Waldner, Kai; Baur, Holger; Schalberger, Patrick; Fruehauf, Norbert; Fuchs, Emmanuel; Ramaswamy, Prasanna; Toomey, Vincent; Drozdek, SławomirThis paper presents a newly developed process for interconnecting microICs with microLEDs through ultra‐precise dispensing of conductive silver‐based paste. Special cleaning and surface energy modification processes have been introduced to achieve interconnects with a width of 5 μm and a minimum pitch of 20 μm. The developed technology is part of the EU funded project “Building Active matrix MicroLED displays By Additive Manufacturing” (BAMBAM), which develops unique manufacturing technologies for realizing microLED displays without TFT backplanes.