Universität Stuttgart
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Item Open Access Novel X-ray lenses for direct and coherent imaging(2019) Sanli, Umut Tunca; Schütz, Gisela (Prof. Dr.)Item Open Access Ion beam lithographic and multilayer fresnel zone plates for soft and hard X-rays: nanofabrication and characterization(2015) Keskinbora, Kahraman; Schütz, Gisela (Prof. Dr.)X-ray microscopy has become an important analytical characterization method for a plethora of applications in materials science, physics, chemistry and biology, thanks to the emergence of modern synchrotron radiation facilities. These facilities enable high brilliance, energy tunable, variable polarization X-rays which gives access to mass density, elemental, chemical, electronic and magnetic properties of materials. In the soft X-ray energies nearly all elements can be probed by spectromicroscopic methods. Another important property of synchrotron radiation is the time structure in the ns to ps range, which can be utilized for sophisticated time resolution studies. These opportunities can be combined with high spatial resolution which is determined by the focusing method and the optic. Focusing of X-rays has historically been a difficult task due to strong absorption and weak phase shift of X-rays within matter. The required phase shift of X-rays, which depends on the real part of the complex refractive index, differs from 1 (the vacuum refractive index) only on the order of 10^-2 to 10^-6 and conventional lenses do not work. One very successful X-ray optic is the Fresnel Zone Plate (FZP), a diffractive optic that act as a lens under certain conditions and can focus X-rays to nanometer sized spots. The resolution of the FZP depends on the width of the outermost zone and is highly correlated with the smallest feature that can be fabricated. Conventionally, the e-beam lithography (EBL) is used for production FZPs which could resolve up to 10 nm structures with serious limitations. One difficulty of EBL is its ever increasing complexity for many-step fabrication of smaller features or intricate geometries. Therefore, EBL is mostly constrained to planar, binary geometries with moderate efficiencies strongly decreasing with energy and not effective for hard X-rays. Special 3D geometries in the form of kinoform lenses can theoretically have 100 % focusing efficiencies. Attempts to approximate these geometries via EBL increased the number of process steps even further. The smallest FZP feature size even for low aspect ratios achievable via EBL is fundamentally limited due to the proximity effect which is the interaction and spread of electrons within the resist material. We addressed these issues by focusing our research on alternative FZP fabrication techniques as high-speed ion beam lithography (IBL), and gray scale ion lithography to realize efficient kinoforms. Another approach towards full-material multilayer FZPs with infinite aspect ratio was based on atomic layer deposition (ALD) with subsequent ion beam slicing. Each of these three methods targets specific challenges faced by the e-beam lithography based FZP fabrication techniques. All the fabricated FZPs were tested for their resolution and efficiency performances at a state of the art scanning transmission X-ray microscope at BESSY for soft X-rays and/or at optical test stations at ESRF and PETRA III for hard X-rays. Using IBL the rapid preparation of a 110 nm thick Au FZP with 50 µm diameter and 50 nm ∆r in less than 13 minutes is demonstrated. Employed for X-ray microscopy, the FZP clearly resolved 28.5 nm features with a cut-off of 24.3 nm at ~1120 eV. Additional process improvements were made towards smaller zones with higher zone quality. They allowed the preparation of a FZP with 30 nm outermost half-period remarkably, in about 8 min. This FZP was shown to clearly resolve 21 nm features on a multilayer test object with large room for improvement. This high through-put FZP production route is of special interest not only concerning the low cost and easy availability. A large array of these optical components is attractive, for experiments such as one-shot ultra-high brilliance FEL investigations due to the radiation damage or for instance for coded-aperture arrays for high-angle resolving X-ray astronomy. Towards fabrication of kinoforms for high efficiency X-ray focusing, we have performed various materials optimization studies in order to achieve a high surface quality optic. After various trials the materials were finally optimized and the fabricated lenses achieved more than 14 % absolute diffraction efficiency that is almost 90 % compared to the theoretical prediction. This confirms how closely we were able to replicate the ideal three dimensional surface relief structure for the first time. It was possible to carry out imaging with these lenses with half-pitch resolutions down to 60 nm. The kinoform lenses were tested at the soft X-ray range where a significant absorption is present in materials. These results also potentially pave the way for very high efficiency hard X-ray focusing which can in principle be utilized in laboratory based X-ray sources, X-ray astronomy and the new rising field of X-ray ptychography. To fabricate high resolution ML-FZPs, Al2O3/Ta2O5multilayers, deposited on a smooth glass optical fiber via atomic layer deposition using non-dedicated instruments were carefully cut-out, sliced and polished to a high quality surface finish using focused ion beams. Following the transfer of the slice to a TEM grid as holder the slices were polished to a high surface finish quality, also via a focused ion beam. Fabricated ML-FZPs were synchrotron tested using an in-house constructed 2-axis tilt stage specially designed for aligning ML-FZP with respect to the X-ray optical axis. The results showed that it was possible to resolve 21 nm features in direct imaging at 1200 eV and sub-30 nm focusing at 8 keV. This is the highest demonstrated resolving power for a multilayer type FZP, to date to the best of our knowledge. Results exhibit the potential for high-resolution hard X-ray focusing where this type of optics are especially efficient. For ultra-high resolution hard and soft X-ray imaging, with potentially achievable ∆r of a few nm is well below what can be achieved through any lithography method available today.Item Open Access Deposition and characterization of multi-functional, complex thin films using atomic layer deposition for copper corrosion protection(2022) Dogan, Gül; Schütz, Gisela (Prof. Dr.)This thesis focuses on ALD thin film protection properties against corrosion of copper to develop an understanding of material interface properties and to develop novel thin films processes. This understanding is then applied to enhance materials with potential use in semiconductor devices. The main research objectives are listed below: Understanding corrosion protection properties of ALD thin films: - Development of protective thin films by combining different oxide layers - To characterize the protection properties at high temperatures and in aggressive environments, - To understand the interaction of copper and ALD protection layers when exposed to high temperatures, - Finding the optimum deposition parameters to achieve defect-free thin layers for best corrosion protection Application of ALD oxide thin films for copper corrosion protection in semiconductor devices: - Structuring the ALD thin films to make reliable interface for copper-copper interconnects with micromachining methods such as laser drilling and plasma etching - To remove ALD layers in a localized, selective way without degradation of the underlying copper layerItem Open Access Soft materials for acoustic applications(2022) Choi, Eunjin; Fischer, Peer (Prof. Dr.)Ultrasound finds wide application in imaging and testing because ultrasound can penetrate tissue and is benign. Gaseous microbubbles strongly scatter ultrasound and are therefore used as contrast agents. Ultrasound responsive materials can be used for many industrial and biomedical applications. Ultrasound can also be used to exert forces and manipulate particles solution and biological cells. In this thesis, material systems are developed for three application areas: 1) models of human organs for the quantitative evaluation of surgical procedures with ultrasound; 2) the fabrication of soft objects by assembling polymeric particles with ultrasound and the acoustic hologram; and 3) the characterization of antibubbles as novel contrast agents that can carry a fluid load. Organ phantoms serve as tools in medical fields to train and plan medical procedures. However, current organ phantoms miss important features or are not realistic. Current models tend to possess a Young’s modulus that is much higher than that of tissue. Furthermore, many of the current models do not show the correct contrast in a medical imaging setting. This thesis presents high fidelity organ phantoms that possess the correct elasticity, compliance, optical appearance, and correct ultrasound contrast. One model is developed for cystoscopy (CY) of the bladder. Another phantom for the transurethral resection of the prostate (TURP). The quality of the phantoms is validated by medical practitioners. For CY, the execution time of the medical practitioners is recorded to completely map the inside of the bladder phantom while localizing tumor models that have been embedded in the bladder wall. For TURP, the quality of the resection is compared with ultrasound imaging before and after the surgical simulation. Parameters are defined to quantify the success of the procedure. The phantoms developed as part of this thesis have received high satisfaction scores from medical practitioners. The parameters reflect the experience of the surgeons. In assembling soft matter, one challenge is that existing 3D printing methods are slow. In contrast, the use of ultrasound patterns shaped with a recently invented acoustic hologram allows objects to be built at once. In this thesis, polydimethylsiloxane (PDMS) particles have been assembled into two-dimensional shapes with ultrasound. To fix the assembly, the PDMS has been physically functionalized with an initiator using swelling. Suitable swelling solutions have been determined based on their solubility. The stability of the physisorbed initiators is evaluated, and the functionalized PDMS particles are fixed via photopolymerization after assembly in aqueous polyethylene glycol dimethacrylate (PEG-DMA) solutions. The fabrication steps can be repeated to increase the thickness of structures that are mechanically stable. The antibubble is an emerging ultrasound contrast agent. It has an inverse form to a conventional bubble in that a substance in the core is surrounded by a gaseous layer. The antibubble is acoustically responsive and, compared to conventional microbubbles, can carry a much greater load. In this thesis, the structure of antibubbles is examined. In particular, the volume of the load is quantified, and the amount of gas per bubble is estimated. The stability of the core substance against diffusion is investigated and shown to be stable for over 11 h.Item Open Access Growth of nanowires and diffusion in bimetallic nanowires : a way to adaptable nanostructures(2023) Suadiye, Eylül; Richter, Gunther (Prof.)