Universität Stuttgart
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Item Open Access Ion beam lithographic and multilayer fresnel zone plates for soft and hard X-rays: nanofabrication and characterization(2015) Keskinbora, Kahraman; Schütz, Gisela (Prof. Dr.)X-ray microscopy has become an important analytical characterization method for a plethora of applications in materials science, physics, chemistry and biology, thanks to the emergence of modern synchrotron radiation facilities. These facilities enable high brilliance, energy tunable, variable polarization X-rays which gives access to mass density, elemental, chemical, electronic and magnetic properties of materials. In the soft X-ray energies nearly all elements can be probed by spectromicroscopic methods. Another important property of synchrotron radiation is the time structure in the ns to ps range, which can be utilized for sophisticated time resolution studies. These opportunities can be combined with high spatial resolution which is determined by the focusing method and the optic. Focusing of X-rays has historically been a difficult task due to strong absorption and weak phase shift of X-rays within matter. The required phase shift of X-rays, which depends on the real part of the complex refractive index, differs from 1 (the vacuum refractive index) only on the order of 10^-2 to 10^-6 and conventional lenses do not work. One very successful X-ray optic is the Fresnel Zone Plate (FZP), a diffractive optic that act as a lens under certain conditions and can focus X-rays to nanometer sized spots. The resolution of the FZP depends on the width of the outermost zone and is highly correlated with the smallest feature that can be fabricated. Conventionally, the e-beam lithography (EBL) is used for production FZPs which could resolve up to 10 nm structures with serious limitations. One difficulty of EBL is its ever increasing complexity for many-step fabrication of smaller features or intricate geometries. Therefore, EBL is mostly constrained to planar, binary geometries with moderate efficiencies strongly decreasing with energy and not effective for hard X-rays. Special 3D geometries in the form of kinoform lenses can theoretically have 100 % focusing efficiencies. Attempts to approximate these geometries via EBL increased the number of process steps even further. The smallest FZP feature size even for low aspect ratios achievable via EBL is fundamentally limited due to the proximity effect which is the interaction and spread of electrons within the resist material. We addressed these issues by focusing our research on alternative FZP fabrication techniques as high-speed ion beam lithography (IBL), and gray scale ion lithography to realize efficient kinoforms. Another approach towards full-material multilayer FZPs with infinite aspect ratio was based on atomic layer deposition (ALD) with subsequent ion beam slicing. Each of these three methods targets specific challenges faced by the e-beam lithography based FZP fabrication techniques. All the fabricated FZPs were tested for their resolution and efficiency performances at a state of the art scanning transmission X-ray microscope at BESSY for soft X-rays and/or at optical test stations at ESRF and PETRA III for hard X-rays. Using IBL the rapid preparation of a 110 nm thick Au FZP with 50 µm diameter and 50 nm ∆r in less than 13 minutes is demonstrated. Employed for X-ray microscopy, the FZP clearly resolved 28.5 nm features with a cut-off of 24.3 nm at ~1120 eV. Additional process improvements were made towards smaller zones with higher zone quality. They allowed the preparation of a FZP with 30 nm outermost half-period remarkably, in about 8 min. This FZP was shown to clearly resolve 21 nm features on a multilayer test object with large room for improvement. This high through-put FZP production route is of special interest not only concerning the low cost and easy availability. A large array of these optical components is attractive, for experiments such as one-shot ultra-high brilliance FEL investigations due to the radiation damage or for instance for coded-aperture arrays for high-angle resolving X-ray astronomy. Towards fabrication of kinoforms for high efficiency X-ray focusing, we have performed various materials optimization studies in order to achieve a high surface quality optic. After various trials the materials were finally optimized and the fabricated lenses achieved more than 14 % absolute diffraction efficiency that is almost 90 % compared to the theoretical prediction. This confirms how closely we were able to replicate the ideal three dimensional surface relief structure for the first time. It was possible to carry out imaging with these lenses with half-pitch resolutions down to 60 nm. The kinoform lenses were tested at the soft X-ray range where a significant absorption is present in materials. These results also potentially pave the way for very high efficiency hard X-ray focusing which can in principle be utilized in laboratory based X-ray sources, X-ray astronomy and the new rising field of X-ray ptychography. To fabricate high resolution ML-FZPs, Al2O3/Ta2O5multilayers, deposited on a smooth glass optical fiber via atomic layer deposition using non-dedicated instruments were carefully cut-out, sliced and polished to a high quality surface finish using focused ion beams. Following the transfer of the slice to a TEM grid as holder the slices were polished to a high surface finish quality, also via a focused ion beam. Fabricated ML-FZPs were synchrotron tested using an in-house constructed 2-axis tilt stage specially designed for aligning ML-FZP with respect to the X-ray optical axis. The results showed that it was possible to resolve 21 nm features in direct imaging at 1200 eV and sub-30 nm focusing at 8 keV. This is the highest demonstrated resolving power for a multilayer type FZP, to date to the best of our knowledge. Results exhibit the potential for high-resolution hard X-ray focusing where this type of optics are especially efficient. For ultra-high resolution hard and soft X-ray imaging, with potentially achievable ∆r of a few nm is well below what can be achieved through any lithography method available today.Item Open Access In situ characterization of phase evolution in LiFePO4(2015) Ohmer, Nils; Maier, Joachim (Prof. Dr.)Among the candidates for electrodes in future Li-based batteries, LiFePO4 (LFP) is one of the most important and most frequently studied materials, undergoing a phase transformation upon delithiation to FePO4 (FP). In spite of the great scientific and practical interest in this material, there is still an extensive debate on the mechanism of this phase transformation and the underlying factors of influence. Within the framework of this thesis, first studies are carried out ex situ on multi-particle, full electrode LFP materials, being electrochemically cycled and analyzed at various states of charge by a combination of highly spatially resolved methods (high-resolution transmission electron microscopy and electron energy loss spectroscopy (HRTEM, EELS)) and integral measurement techniques (analyzing the X-ray diffraction and X-ray absorption near edge structure (XRD, XANES)). This combination of characterization techniques allows one to distinguish between the cycling behaviour of differently sized crystallites within the same electrode. It is found that for electrodes with hydrothermally grown LFP as active material, a particle size dependent cycling behaviour exists, with nanosized particles apparently not participating in the charging process at all. A turbostratic stacking of layers in these nanosized particles is found and identified to be responsible for sluggish lithium insertion and extraction. These higher dimensional defects prevent the small particles from participating in the charging process, most likely by disturbing the lithium diffusion along the 1-dimensional channels, as well as impair the transport along the other directions in the LFP host structure and thus blocking the lithium transport, resulting in a comparibly lower practical capacity during electrochemical cycling. To study the lithium exchange mechanism upon charging a LFP thin film cathode, an all-solid-state thin film battery cell with a lateral design concept is developed and realized by pulsed laser deposition (PLD) and thermal evaporation techniques. Using PLD and shadow masks LFP cathode, Li2O-V2O5-SiO2 (LVSO) electrolyte and LiAl anode thin films are deposited sequentially in a way that the Li transport pathway in the resulting battery is along the X-ray transparent commercial Si3N4 membrane substrate. This enables the usability of synchrotron-based energy resolved scanning transmission X-ray microscopy (STXM) with its high chemical and spatial resolution to perform in situ absorption measurements at the Fe L3 edge. Upon delithiation, a shift in the main absorption feature from 708 to 710 eV is used to fingerprint the change in the local state of charge, identifying areas containing Fe2+ (lithiated) and Fe3+ (delithiated), respectively. The initial lithiation process of a LFP thin film cathode material has been followed by in situ STXM, with a lateral resolution of 30 nm, during electrochemical charging of the thin film battery. The observed initial lithiation process does not follow the classical particle by particle mechanism, typical for multi-particle LFP cathodes, but instead a rather simultaneous, although inhomogeneous, lithiation is observed. The reason for this change in mechanism, compared to multi-particle powder electrodes, is found in mechanical interactions within the thin film upon lithiation, i.e. in the corresponding volume expansion and formation of high energy surfaces, changing the shape of the single-particle chemical potential to a monotone form upon lithiation. This has far-reaching consequences: not only the many-particle mechanism is changed to a concurrent lithiation, but also the single-particle mechanism is changed from a two-phase to a single-phase mechanism upon lithiation. Furthermore, a vanishing hysteresis loop and the disappearing of the memory effect is predicted. These findings are rather general and applicable to all kind of thin films of phase separating intercalation materials, undergoing a volume change upon lithium exchange. To fill the gap in literature on in situ observations of the (L)FP phase evolution on a single-particle level with appreciable space and time resolution, a micrometer-sized all-solid-state thin film battery is built with a defect-chemically well characterized LFP single crystal as cathode material with dimensions of 16x1x0.2 micrometer. Using STXM, the phase evolution along the fast (010) orientation is followed during in situ electrochemical (de)lithiation on a micro-meter scale with a lateral resolution of 30 nm and with minutes of time resolution. Furthermore, the STXM measurements performed on this sample are one of the few experiments ever taken on LFP materials with a well defined defect chemistry, even though fundamentally necessary for an overall understanding of the materials behaviour. This combination discloses not only the mechanism of LFP transformation on a single-particle level, but also the significance of elastic effects on the (de)lithiation process. Using a defect chemical analysis, the position of phase formation is found to be determined by the defect chemical situation, while the growth pattern of both LFP and FP is found to be dominated by elastic effects.