Optical methods become useful tools for dimensional measurements. Methods based on triangulation, time of flight, phase measurements and interferometry are used and will be further developed. Multiple wavelength interferometry allows the reduction of the sensitivity by a range extension leading to robust measuring systems. Superheterodyne interferometric techniques based on two wavelength heterodyne interferometry will also be discussed and experimental results will be shown.
(1990) Fischer, Edgar; Sodnik, Zoran; Ittner, Thomas; Tiziani, Hans J.
For interferometric topography measurements of optically rough surfaces dual wavelength heterodyne Interferometry (DWHI) is a powerful tool. A DWHI system based on a two-wavelength HeNe laser and a matched grating technique is described. This set-up improves system stability and simple heterodyne frequency generation.
