Process development methods in microtechnology and the associated process environment

Abstract

Microsystem technology (MST) and micro-electro-mechanical systems (MEMS) are key technologies that continually introduce new application opportunities. Increasing complexity and individualization require systematic process development to avoid errors and delays. While existing methods for process development address various aspects of the manufacturing process, the systematic consideration of external factors influencing the process environment (PEnv) remains broadly inadequate. Despite extensive standards, PEnv-related influences lead to quality fluctuations in practice. A list of influencing factors and an example process illustrate these challenges. This study aims to analyze which methods exist for process development in MST and to what extent they systematically consider process environmental factors. A mixed methods design was used for the analysis. In a systematic literature review (SLR) using traditional databases and Artificial intelligence-supported search tools, a total of 75 relevant studies from the years 2005 to 2024 were identified. The methods that cover various aspects of process development are presented in an overview. An adapted GRADE (Grading of Recommendations Assessment, Development, and Evaluation) analysis was used to check the extent to which the PEnv can be included in process development using the methods currently available. The results show that existing approaches often take PEnv into account insufficiently. Efficient consideration with the use of current methods requires extensive expert knowledge, knowledge management, and project-specific supplementary methods. This study emphasizes the need for research into methods that systematically integrate environmental requirements into process development to improve the efficiency and quality of MST manufacturing in this area.