Diffractive microoptics in porous silicon oxide by grayscale lithography

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dc.contributor.authorSiegle, Leander
dc.contributor.authorXie, Dajie
dc.contributor.authorRichards, Corey A.
dc.contributor.authorBraun, Paul V.
dc.contributor.authorGiessen, Harald
dc.date.accessioned2025-12-19T14:56:32Z
dc.date.issued2024
dc.identifier.issn1094-4087
dc.identifier.other1947500511
dc.identifier.urihttp://nbn-resolving.de/urn:nbn:de:bsz:93-opus-ds-177070de
dc.identifier.urihttps://elib.uni-stuttgart.de/handle/11682/17707
dc.identifier.urihttps://doi.org/10.18419/opus-17688
dc.language.isoen
dc.relationinfo:eu-repo/grantAgreement/EC/H2020/862549
dc.relationinfo:eu-repo/grantAgreement/EC/HE/101115545
dc.relation.uridoi:10.1364/OE.538142
dc.rightsCC BY
dc.rightsinfo:eu-repo/semantics/openAccess
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/
dc.subject.ddc530
dc.titleDiffractive microoptics in porous silicon oxide by grayscale lithographyen
dc.typearticle
dc.type.versionpublishedVersion
ubs.fakultaetMathematik und Physik
ubs.fakultaetFakultäts- und hochschulübergreifende Einrichtungen
ubs.fakultaetFakultätsübergreifend / Sonstige Einrichtung
ubs.institut4. Physikalisches Institut
ubs.institutStuttgart Research Centre of Photonic Engineering (SCoPE)
ubs.institutFakultätsübergreifend / Sonstige Einrichtung
ubs.publikation.seiten35678-35688
ubs.publikation.sourceOptics express 32 (2024), pp. 35678-35688
ubs.publikation.typZeitschriftenartikel
ubs.unilizenzOK

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