Tiziani, Hans J.2011-02-212016-03-312011-02-212016-03-311972346586585http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-60525http://elib.uni-stuttgart.de/handle/11682/7504http://dx.doi.org/10.18419/opus-7487A new method is proposed where small tilts can be measured with high accuracy even in the presence of a lateral shift. For this purpose the speckling of the object, an optically rough surface, is recorded in the Fourier plane before and after a tilt. By illuminating the developed plate with a laser, fringeswith spacings inversely proportional to the tilt angle can be observed.eninfo:eu-repo/semantics/openAccessSpeckle-Interferometrie , Laser , Optische Messtechnik530A study of the use of laser speckle to measure small tilts of optically rough surfaces accuratelyarticle