Boebel, DorisPackroß, BerndTiziani, Hans J.2011-04-012016-03-312011-04-012016-03-311991349969787http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-62490http://elib.uni-stuttgart.de/handle/11682/4439http://dx.doi.org/10.18419/opus-4422The evaluation of the interference pattern of a prism interferometer by a phase-stepping technique is described. The required phase shift is achieved by moving the surface under test perpendicular to the hypotenuse of the prism. Limits of this phase-shifting technique are discussed. A calibration method of the phase shift between the interferograms for the adjustable sensitivity of the interferometer is shown. Finally measurements of technical surfaces are presented.eninfo:eu-repo/semantics/openAccessPhasenverschiebung , Interferometrie620article