Fischer, EdgarSodnik, ZoranIttner, ThomasTiziani, Hans J.2011-03-212016-03-312011-03-212016-03-311990366636197http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-61433http://elib.uni-stuttgart.de/handle/11682/4394http://dx.doi.org/10.18419/opus-4377For interferometric topography measurements of optically rough surfaces dual wavelength heterodyne Interferometry (DWHI) is a powerful tool. A DWHI system based on a two-wavelength HeNe laser and a matched grating technique is described. This set-up improves system stability and simple heterodyne frequency generation.eninfo:eu-repo/semantics/openAccessInterferometrie , Optische Messtechnik530conferenceObject2012-07-03