Genssler, Paul R.Klemme, FlorianParihar, Shivendra SinghBrandhofer, SebastianPahwa, GirishPolian, IliaChauhan, Yogesh SinghAmrouch, Hussam2024-07-302024-07-3020232689-1808189722737Xhttp://nbn-resolving.de/urn:nbn:de:bsz:93-opus-ds-147490http://elib.uni-stuttgart.de/handle/11682/14749http://dx.doi.org/10.18419/opus-14730eninfo:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by/4.0/004621.3Cryogenic embedded system to support quantum computing : from 5-nm FinFET to full processorarticle