Sodnik, ZoranFischer, EdgarIttner, ThomasTiziani, Hans J.2011-03-172016-03-312011-03-172016-03-311991349033404http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-61544http://elib.uni-stuttgart.de/handle/11682/4373http://dx.doi.org/10.18419/opus-4356Two-wavelength double heterodyne interferometry is applied for topographic measurements on optically rough target surfaces. A two-wavelength He-Ne laser and a matched grating technique are used to improve system stability and to simplify heterodyne frequency generation.eninfo:eu-repo/semantics/openAccessHeterodyninterferometrie , Oberflächenstruktur , Optische Messtechnik620article2011-03-17