Leonhardt, KlausJordan, Hans-JoachimTiziani, Hans J.2011-03-172016-03-312011-03-172016-03-311991349032238http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-61511http://elib.uni-stuttgart.de/handle/11682/4372http://dx.doi.org/10.18419/opus-4355A new instrumental concept for surface measurement is described. In Micro-Ellipso-Height-Profilometry three independent profiles h(x), &#968;(x) and &#916;(x) of a surface are measured from one diffraction limited scanning spot. The basic equations for the extraction of these three quantities are derived and first results are discussed.eninfo:eu-repo/semantics/openAccessProfil <Oberfläche> , Oberflächenstruktur530article