Jeong, Hyeon-HoMark, Andrew G.Gibbs, John G.Reindl, ThomasWaizmann, UlrikeWeis, JürgenFischer, Peer2024-12-032024-12-0320141361-65280957-44841914046463http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-ds-153772http://elib.uni-stuttgart.de/handle/11682/15377http://dx.doi.org/10.18419/opus-15358Controlled local fabrication of three-dimensional (3D) nanostructures is important to explore and enhance the function of single nanodevices, but is experimentally challenging. We present a scheme based on e-beam lithography (EBL) written seeds, and glancing angle deposition (GLAD) grown structures to create nanoscale objects with defined shapes but in aperiodic arrangements. By using a continuous sacrificial corral surrounding the features of interest we grow isolated 3D nanostructures that have complex cross-sections and sidewall morphology that are surrounded by zones of clean substrate.eninfo:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by/3.0/530540article2023-11-14