Sämann, ChristianKöhler, Jürgen R.Dahlinger, MorrisSchubert, Markus B.Werner, Jürgen H.2016-06-272016-06-2720161996-1944472212974http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-ds-88146http://elib.uni-stuttgart.de/handle/11682/8814http://dx.doi.org/10.18419/opus-8797eninfo:eu-repo/semantics/openAccess620Pulsed laser porosification of silicon thin filmsarticle