A study of the use of laser speckle to measure small tilts of optically rough surfaces accurately

Abstract

A new method is proposed where small tilts can be measured with high accuracy even in the presence of a lateral shift. For this purpose the speckling of the object, an optically rough surface, is recorded in the Fourier plane before and after a tilt. By illuminating the developed plate with a laser, fringeswith spacings inversely proportional to the tilt angle can be observed.