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http://dx.doi.org/10.18419/opus-12732
Autor(en): | Gaedike, Bastian Guth, Svenja Kern, Frank Killinger, Andreas Gadow, Rainer |
Titel: | Deposition of 3YSZ-TiC PVD coatings with high-power impulse magnetron sputtering (HiPIMS) |
Erscheinungsdatum: | 2021 |
Dokumentart: | Zeitschriftenartikel |
Seiten: | 9 |
Erschienen in: | Applied sciences 11 (2021), No. 2753 |
URI: | http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-ds-127515 http://elib.uni-stuttgart.de/handle/11682/12751 http://dx.doi.org/10.18419/opus-12732 |
ISSN: | 2076-3417 |
Zusammenfassung: | Optimized coating adhesion and strength are the advantages of high-power impulse magnetron sputtering (HiPIMS) as an innovative physical vapor deposition (PVD) process. When depositing electrically non-conductive oxide ceramics as coatings with HiPIMS without dual magnetron sputtering (DMS) or mid-frequency (MF) sputtering, the growing coating leads to increasing electrical insulation of the anode. As a consequence, short circuits occur, and the process breaks down. This phenomenon is also known as the disappearing anode effect. In this study, a new approach involving adding electrically conductive carbide ceramics was tried to prevent the electrical insulation of the anode and thereby guarantee process stability. Yttria-stabilized zirconia (3YSZ) with 30 vol.% titanium carbide (TiC) targets are used in a non-reactive HiPIMS process. The main focus of this study is a parameter inquisition. Different HiPIMS parameters and their impact on the measured current at the substrate table are analyzed. This study shows the successful use of electrically conductive carbide ceramics in a non-conductive oxide as the target material. In addition, we discuss the observed high table currents with a low inert gas mix, where the process was not expected to be stable. |
Enthalten in den Sammlungen: | 07 Fakultät Konstruktions-, Produktions- und Fahrzeugtechnik |
Dateien zu dieser Ressource:
Datei | Beschreibung | Größe | Format | |
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applsci-11-02753.pdf | 907,04 kB | Adobe PDF | Öffnen/Anzeigen |
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