Micro shape and rough surface analysis by fringe projection

Leonhardt, Klaus; Droste, Ulrich; Schön, Stefan; Voland, Christoph; Tiziani, Hans J.

Micro shape and rough surface analysis by fringe projection

dc.contributor.author	Leonhardt, Klaus	de
dc.contributor.author	Droste, Ulrich	de
dc.contributor.author	Schön, Stefan	de
dc.contributor.author	Voland, Christoph	de
dc.contributor.author	Tiziani, Hans J.	de
dc.date.accessioned	2011-04-18	de
dc.date.accessioned	2016-03-31T08:16:44Z
dc.date.available	2011-04-18	de
dc.date.available	2016-03-31T08:16:44Z
dc.date.issued	1993	de
dc.date.updated	2012-06-27	de
dc.description.abstract	A new microscopic fringe projection system is described. Projection of the grating and imaging of the fringes is accomplished by the same objective. The spectrum of the binary grating is spatially filtered and projected into the aperture with a lateral shift. This leads to telecentric projection and imaging under oblique incidence. Topographies of specularely as well as diffusely reflecting surfaces can be obtained. The measurement of rough, technical surfaces is demonstrated.	en
dc.identifier.other	36735621X	de
dc.identifier.uri	http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-62655	de
dc.identifier.uri	http://elib.uni-stuttgart.de/handle/11682/4444
dc.identifier.uri	http://dx.doi.org/10.18419/opus-4427
dc.language.iso	en	de
dc.rights	info:eu-repo/semantics/openAccess	de
dc.subject.classification	Oberflächenstruktur , Profil <Oberfläche>	de
dc.subject.ddc	620	de
dc.title	Micro shape and rough surface analysis by fringe projection	en
dc.type	conferenceObject	de
ubs.fakultaet	Fakultät Konstruktions-, Produktions- und Fahrzeugtechnik	de
ubs.institut	Institut für Technische Optik	de
ubs.opusid	6265	de
ubs.publikation.source	Optics as a key to high technology. T. 1. Bellingham, Wash. : SPIE, 1993 (Proceedings / SPIE 1983), S. 311-312	de
ubs.publikation.typ	Konferenzbeitrag	de

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