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  4. General mathematical model for the period chirp in interference lithography
 

General mathematical model for the period chirp in interference lithography

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oe-31-4-5334.pdf (18.34 MB)

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2023

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Bienert, Florian
Graf, Thomas
Abdou Ahmed, Marwan

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http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-ds-148294
http://elib.uni-stuttgart.de/handle/11682/14829
http://dx.doi.org/10.18419/opus-14810

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07 Fakultät Konstruktions-, Produktions- und Fahrzeugtechnik

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info:eu-repo/semantics/openAccess
Except where otherwised noted, this item's license is described as info:eu-repo/semantics/openAccess
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