Phase shifting in an oblique incidence interferometer

dc.contributor.authorBoebel, Dorisde
dc.contributor.authorPackroß, Berndde
dc.contributor.authorTiziani, Hans J.de
dc.date.accessioned2011-04-01de
dc.date.accessioned2016-03-31T08:16:42Z
dc.date.available2011-04-01de
dc.date.available2016-03-31T08:16:42Z
dc.date.issued1991de
dc.description.abstractThe evaluation of the interference pattern of a prism interferometer by a phase-stepping technique is described. The required phase shift is achieved by moving the surface under test perpendicular to the hypotenuse of the prism. Limits of this phase-shifting technique are discussed. A calibration method of the phase shift between the interferograms for the adjustable sensitivity of the interferometer is shown. Finally measurements of technical surfaces are presented.en
dc.identifier.other349969787de
dc.identifier.urihttp://nbn-resolving.de/urn:nbn:de:bsz:93-opus-62490de
dc.identifier.urihttp://elib.uni-stuttgart.de/handle/11682/4439
dc.identifier.urihttp://dx.doi.org/10.18419/opus-4422
dc.language.isoende
dc.rightsinfo:eu-repo/semantics/openAccessde
dc.subject.classificationPhasenverschiebung , Interferometriede
dc.subject.ddc620de
dc.titlePhase shifting in an oblique incidence interferometeren
dc.typearticlede
ubs.fakultaetFakultät Konstruktions-, Produktions- und Fahrzeugtechnikde
ubs.fakultaetFakultätsübergreifend / Sonstige Einrichtungde
ubs.institutInstitut für Technische Optikde
ubs.institutSonstige Einrichtungde
ubs.opusid6249de
ubs.publikation.sourceOptical engineering 30 (1991), S. 1910-1914de
ubs.publikation.typZeitschriftenartikelde

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