Two-wavelength double heterodyne interferometry using a matched grating technique

dc.contributor.authorSodnik, Zorande
dc.contributor.authorFischer, Edgarde
dc.contributor.authorIttner, Thomasde
dc.contributor.authorTiziani, Hans J.de
dc.date.accessioned2011-03-17de
dc.date.accessioned2016-03-31T08:16:30Z
dc.date.available2011-03-17de
dc.date.available2016-03-31T08:16:30Z
dc.date.issued1991de
dc.date.updated2011-03-17de
dc.description.abstractTwo-wavelength double heterodyne interferometry is applied for topographic measurements on optically rough target surfaces. A two-wavelength He-Ne laser and a matched grating technique are used to improve system stability and to simplify heterodyne frequency generation.en
dc.identifier.other349033404de
dc.identifier.urihttp://nbn-resolving.de/urn:nbn:de:bsz:93-opus-61544de
dc.identifier.urihttp://elib.uni-stuttgart.de/handle/11682/4373
dc.identifier.urihttp://dx.doi.org/10.18419/opus-4356
dc.language.isoende
dc.rightsinfo:eu-repo/semantics/openAccessde
dc.subject.classificationHeterodyninterferometrie , Oberflächenstruktur , Optische Messtechnikde
dc.subject.ddc620de
dc.titleTwo-wavelength double heterodyne interferometry using a matched grating techniqueen
dc.typearticlede
ubs.fakultaetFakultät Konstruktions-, Produktions- und Fahrzeugtechnikde
ubs.institutInstitut für Technische Optikde
ubs.opusid6154de
ubs.publikation.sourceApplied optics 30 (1991), S. 3139-3144. URL http://dx.doi.org./10.1364/AO.30.003139de
ubs.publikation.typZeitschriftenartikelde

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