Micro-ellipso-height-profilometry

dc.contributor.author	Leonhardt, Klaus	de
dc.contributor.author	Jordan, Hans-Joachim	de
dc.contributor.author	Tiziani, Hans J.	de
dc.date.accessioned	2011-03-17	de
dc.date.accessioned	2016-03-31T08:16:30Z
dc.date.available	2011-03-17	de
dc.date.available	2016-03-31T08:16:30Z
dc.date.issued	1991	de
dc.description.abstract	A new instrumental concept for surface measurement is described. In Micro-Ellipso-Height-Profilometry three independent profiles h(x), ψ(x) and Δ(x) of a surface are measured from one diffraction limited scanning spot. The basic equations for the extraction of these three quantities are derived and first results are discussed.	en
dc.identifier.other	349032238	de
dc.identifier.uri	http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-61511	de
dc.identifier.uri	http://elib.uni-stuttgart.de/handle/11682/4372
dc.identifier.uri	http://dx.doi.org/10.18419/opus-4355
dc.language.iso	en	de
dc.rights	info:eu-repo/semantics/openAccess	de
dc.subject.classification	Profil <Oberfläche> , Oberflächenstruktur	de
dc.subject.ddc	530	de
dc.title	Micro-ellipso-height-profilometry	en
dc.type	article	de
ubs.fakultaet	Fakultät Konstruktions-, Produktions- und Fahrzeugtechnik	de
ubs.institut	Institut für Technische Optik	de
ubs.opusid	6151	de
ubs.publikation.source	Optics communications 80 (1991), S. 205-209. URL http://dx.doi.org./10.1016/0030-4018(91)90251-8	de
ubs.publikation.typ	Zeitschriftenartikel	de

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