Shape control in wafer-based aperiodic 3D nanostructures

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dc.contributor.authorJeong, Hyeon-Ho
dc.contributor.authorMark, Andrew G.
dc.contributor.authorGibbs, John G.
dc.contributor.authorReindl, Thomas
dc.contributor.authorWaizmann, Ulrike
dc.contributor.authorWeis, Jürgen
dc.contributor.authorFischer, Peer
dc.date.accessioned2024-12-03T08:37:40Z
dc.date.available2024-12-03T08:37:40Z
dc.date.issued2014de
dc.date.updated2023-11-14T03:01:47Z
dc.description.abstractControlled local fabrication of three-dimensional (3D) nanostructures is important to explore and enhance the function of single nanodevices, but is experimentally challenging. We present a scheme based on e-beam lithography (EBL) written seeds, and glancing angle deposition (GLAD) grown structures to create nanoscale objects with defined shapes but in aperiodic arrangements. By using a continuous sacrificial corral surrounding the features of interest we grow isolated 3D nanostructures that have complex cross-sections and sidewall morphology that are surrounded by zones of clean substrate.en
dc.description.sponsorshipMax Planck Societyde
dc.description.sponsorshipEuropean Research Councilde
dc.identifier.issn1361-6528
dc.identifier.issn0957-4484
dc.identifier.other1914046463
dc.identifier.urihttp://nbn-resolving.de/urn:nbn:de:bsz:93-opus-ds-153772de
dc.identifier.urihttp://elib.uni-stuttgart.de/handle/11682/15377
dc.identifier.urihttp://dx.doi.org/10.18419/opus-15358
dc.language.isoende
dc.relationinfo:eu-repo/grantAgreement/EC/FP7/278213de
dc.relation.uridoi:10.1088/0957-4484/25/23/235302de
dc.rightsinfo:eu-repo/semantics/openAccessde
dc.rights.urihttps://creativecommons.org/licenses/by/3.0/de
dc.subject.ddc530de
dc.subject.ddc540de
dc.titleShape control in wafer-based aperiodic 3D nanostructuresen
dc.typearticlede
ubs.fakultaetChemiede
ubs.fakultaetExterne wissenschaftliche Einrichtungende
ubs.institutInstitut für Physikalische Chemiede
ubs.institutMax-Planck-Institut für Festkörperforschungde
ubs.institutMax-Planck-Institut für Intelligente Systemede
ubs.publikation.seiten7de
ubs.publikation.sourceNanotechnology 25 (2014), No. 235302de
ubs.publikation.typZeitschriftenartikelde

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