Pulsed laser porosification of silicon thin films

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materials-09-00509.pdf (3.88 MB)

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2016

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http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-ds-88146
 http://elib.uni-stuttgart.de/handle/11682/8814
 http://dx.doi.org/10.18419/opus-8797

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05 Fakultät Informatik, Elektrotechnik und Informationstechnik

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