Bienert, FlorianGraf, ThomasAbdou Ahmed, Marwan2024-08-132024-08-1320231094-4087189877787Xhttp://nbn-resolving.de/urn:nbn:de:bsz:93-opus-ds-148294http://elib.uni-stuttgart.de/handle/11682/14829http://dx.doi.org/10.18419/opus-14810eninfo:eu-repo/semantics/openAccesshttps://creativecommons.org/licenses/by/4.0/510530General mathematical model for the period chirp in interference lithographyarticle