05 Fakultät Informatik, Elektrotechnik und Informationstechnik

Permanent URI for this collectionhttps://elib.uni-stuttgart.de/handle/11682/6

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Author: search.filters.author.Oehme, MichaelSubject: search.filters.subject.530

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    Plasmonic gratings from highly doped Ge1-ySny films on Si
    (2021) Berkmann, Fritz; Ayasse, Markus; Schlipf, Jon; Mörz, Florian; Weißhaupt, David; Oehme, Michael; Prucnal, Slawomir; Kawaguchi, Yuma; Schwarz, Daniel; Fischer, Inga Anita; Schulze, Jörg
    Plasmonic modes in metal structures are of great interest for optical applications. While metals such as Au and Ag are highly suitable for such applications at visible wavelengths, their high Drude losses limit their usefulness at mid-infrared wavelengths. Highly n-doped Ge1-ySny alloys are interesting possible alternative materials for plasmonic applications in this wavelength range. Here, we investigate the use of highly n-doped Ge1-ySny films grown directly on Si by molecular beam epitaxy with varying Sn-content from 0% up to 7.6% for plasmonic grating structures. We compare plasma wavelengths and relaxation times obtained from electrical and optical characterization. While theoretical considerations indicate that the decreasing effective mass with increasing Sn content in Ge1-ySny films could improve performance for plasmonic applications, our optical characterization results show that the utilization of Ge1-ySny films grown directly on Si is only beneficial if material quality can be improved.
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    Raman shifts in MBE‐grown SixGe1 - x - ySny alloys with large Si content
    (2021) Schlipf, Jon; Tetzner, Henriette; Spirito, Davide; Manganelli, Costanza L.; Capellini, Giovanni; Huang, Michael R. S.; Koch, Christoph T.; Clausen, Caterina J.; Elsayed, Ahmed; Oehme, Michael; Chiussi, Stefano; Schulze, Jörg; Fischer, Inga A.
    We examine the Raman shift in silicon-germanium-tin alloys with high silicon content grown on a germanium virtual substrate by molecular beam epitaxy. The Raman shifts of the three most prominent modes, Si-Si, Si-Ge, and Ge-Ge, are measured and compared with results in previous literature. We analyze and fit the dependence of the three modes on the composition and strain of the semiconductor alloys. We also demonstrate the calculation of the composition and strain of SixGe1 - x - ySny from the Raman shifts alone, based on the fitted relationships. Our analysis extends previous results to samples lattice matched on Ge and with higher Si content than in prior comprehensive Raman analyses, thus making Raman measurements as a local, fast, and nondestructive characterization technique accessible for a wider compositional range of these ternary alloys for silicon‐based photonic and microelectronic devices.
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    Band-gap and strain engineering in GeSn alloys using post-growth pulsed laser melting
    (2022) Steuer, Oliver; Schwarz, Daniel; Oehme, Michael; Schulze, Jörg; Mączko, Herbert; Kudrawiec, Robert; Fischer, Inga A.; Heller, René; Hübner, René; Khan, Muhammad Moazzam; Georgiev, Yordan M.; Zhou, Shengqiang; Helm, Manfred; Prucnal, Slawomir
    The pseudomorphic growth of Ge1-xSnx on Ge causes in-plane compressive strain, which degrades the superior properties of the Ge1-xSnx alloys. Therefore, efficient strain engineering is required. In this article, we present strain and band-gap engineering in Ge1-xSnx alloys grown on Ge a virtual substrate using post-growth nanosecond pulsed laser melting (PLM). Micro-Raman and x-ray diffraction (XRD) show that the initial in-plane compressive strain is removed. Moreover, for PLM energy densities higher than 0.5 J cm-2, the Ge0.89Sn0.11 layer becomes tensile strained. Simultaneously, as revealed by Rutherford Backscattering spectrometry, cross-sectional transmission electron microscopy investigations and XRD the crystalline quality and Sn-distribution in PLM-treated Ge0.89Sn0.11 layers are only slightly affected. Additionally, the change of the band structure after PLM is confirmed by low-temperature photoreflectance measurements. The presented results prove that post-growth ns-range PLM is an effective way for band-gap and strain engineering in highly-mismatched alloys.