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http://dx.doi.org/10.18419/opus-12732
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DC Element | Wert | Sprache |
---|---|---|
dc.contributor.author | Gaedike, Bastian | - |
dc.contributor.author | Guth, Svenja | - |
dc.contributor.author | Kern, Frank | - |
dc.contributor.author | Killinger, Andreas | - |
dc.contributor.author | Gadow, Rainer | - |
dc.date.accessioned | 2023-02-20T13:01:12Z | - |
dc.date.available | 2023-02-20T13:01:12Z | - |
dc.date.issued | 2021 | - |
dc.identifier.issn | 2076-3417 | - |
dc.identifier.other | 1837280088 | - |
dc.identifier.uri | http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-ds-127515 | de |
dc.identifier.uri | http://elib.uni-stuttgart.de/handle/11682/12751 | - |
dc.identifier.uri | http://dx.doi.org/10.18419/opus-12732 | - |
dc.description.abstract | Optimized coating adhesion and strength are the advantages of high-power impulse magnetron sputtering (HiPIMS) as an innovative physical vapor deposition (PVD) process. When depositing electrically non-conductive oxide ceramics as coatings with HiPIMS without dual magnetron sputtering (DMS) or mid-frequency (MF) sputtering, the growing coating leads to increasing electrical insulation of the anode. As a consequence, short circuits occur, and the process breaks down. This phenomenon is also known as the disappearing anode effect. In this study, a new approach involving adding electrically conductive carbide ceramics was tried to prevent the electrical insulation of the anode and thereby guarantee process stability. Yttria-stabilized zirconia (3YSZ) with 30 vol.% titanium carbide (TiC) targets are used in a non-reactive HiPIMS process. The main focus of this study is a parameter inquisition. Different HiPIMS parameters and their impact on the measured current at the substrate table are analyzed. This study shows the successful use of electrically conductive carbide ceramics in a non-conductive oxide as the target material. In addition, we discuss the observed high table currents with a low inert gas mix, where the process was not expected to be stable. | en |
dc.language.iso | en | de |
dc.relation.uri | doi:10.3390/app11062753 | de |
dc.rights | info:eu-repo/semantics/openAccess | de |
dc.rights.uri | https://creativecommons.org/licenses/by/4.0/ | de |
dc.subject.ddc | 670 | de |
dc.title | Deposition of 3YSZ-TiC PVD coatings with high-power impulse magnetron sputtering (HiPIMS) | en |
dc.type | article | de |
dc.date.updated | 2021-04-09T01:42:44Z | - |
ubs.fakultaet | Konstruktions-, Produktions- und Fahrzeugtechnik | de |
ubs.fakultaet | Fakultätsübergreifend / Sonstige Einrichtung | de |
ubs.institut | Institut für Fertigungstechnologie keramischer Bauteile | de |
ubs.institut | Fakultätsübergreifend / Sonstige Einrichtung | de |
ubs.publikation.seiten | 9 | de |
ubs.publikation.source | Applied sciences 11 (2021), No. 2753 | de |
ubs.publikation.typ | Zeitschriftenartikel | de |
Enthalten in den Sammlungen: | 07 Fakultät Konstruktions-, Produktions- und Fahrzeugtechnik |
Dateien zu dieser Ressource:
Datei | Beschreibung | Größe | Format | |
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applsci-11-02753.pdf | 907,04 kB | Adobe PDF | Öffnen/Anzeigen |
Diese Ressource wurde unter folgender Copyright-Bestimmung veröffentlicht: Lizenz von Creative Commons