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http://dx.doi.org/10.18419/opus-13735
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DC Element | Wert | Sprache |
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dc.contributor.author | Al Nusayer, Sheikh Abdullah | - |
dc.contributor.author | Schalberger, Patrick | - |
dc.contributor.author | Baur, Holger | - |
dc.contributor.author | Kleber, Florian | - |
dc.contributor.author | Fruehauf, Norbert | - |
dc.date.accessioned | 2023-11-08T16:10:50Z | - |
dc.date.available | 2023-11-08T16:10:50Z | - |
dc.date.issued | 2023 | de |
dc.identifier.issn | 1071-0922 | - |
dc.identifier.issn | 1938-3657 | - |
dc.identifier.other | 1870780523 | - |
dc.identifier.uri | http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-ds-137542 | de |
dc.identifier.uri | http://elib.uni-stuttgart.de/handle/11682/13754 | - |
dc.identifier.uri | http://dx.doi.org/10.18419/opus-13735 | - |
dc.description.abstract | Active matrix prestressed microelectromechanical shutter displays enable outstanding optical properties as well as robust operating performance. The microelectromechanical systems (MEMS) shutter elements have been optimized for higher light outcoupling efficiency with lower operation voltage and higher pixel density. The MEMS elements have been co-fabricated with self-aligned metal-oxide thin-film transistors (TFTs). Several optimizations were required to integrate MEMS process without hampering the performance of both elements. The optimized display process requires only seven photolithographic masks with ensuring proper compatibility between MEMS shutter and metal-oxide TFT process. | en |
dc.description.sponsorship | Projekt DEAL | de |
dc.language.iso | en | de |
dc.relation.uri | doi:10.1002/jsid.1252 | de |
dc.rights | info:eu-repo/semantics/openAccess | de |
dc.rights.uri | https://creativecommons.org/licenses/by/4.0/ | de |
dc.subject.ddc | 670 | de |
dc.title | High‐performance MEMS shutter display with metal‐oxide thin‐film transistors and optimized MEMS element | en |
dc.type | article | de |
dc.date.updated | 2023-10-10T22:01:35Z | - |
ubs.fakultaet | Informatik, Elektrotechnik und Informationstechnik | de |
ubs.fakultaet | Fakultäts- und hochschulübergreifende Einrichtungen | de |
ubs.institut | Institut für Großflächige Mikroelektronik | de |
ubs.institut | Stuttgart Research Centre of Photonic Engineering (SCoPE) | de |
ubs.publikation.seiten | 535-547 | de |
ubs.publikation.source | Journal of the Society for Information Display 31 (2023), S. 535-547 | de |
ubs.publikation.typ | Zeitschriftenartikel | de |
Enthalten in den Sammlungen: | 05 Fakultät Informatik, Elektrotechnik und Informationstechnik |
Dateien zu dieser Ressource:
Datei | Beschreibung | Größe | Format | |
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JSID_JSID1252.pdf | 2,81 MB | Adobe PDF | Öffnen/Anzeigen |
Diese Ressource wurde unter folgender Copyright-Bestimmung veröffentlicht: Lizenz von Creative Commons