Please use this identifier to cite or link to this item: http://dx.doi.org/10.18419/opus-4374
Authors: Leonhardt, Klaus
Rippert, Karl-Heinz
Tiziani, Hans J.
Title: Optical methods of measuring rough surfaces
Issue Date: 1989
metadata.ubs.publikation.typ: Konferenzbeitrag
metadata.ubs.publikation.source: Bennett, Jean M. (Hrsg.): Surface measurement and characterization : ECO 1, 19-21 September 1988, Hamburg. Bellingham, Wash. : SPIE, 1989 (Proceedings / SPIE 1009). - ISBN 0-8194-0044-0, S. 22-29
URI: http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-61269
http://elib.uni-stuttgart.de/handle/11682/4391
http://dx.doi.org/10.18419/opus-4374
Abstract: The statistical parameters of surfaces to be measured for industrial applications vary over several orders of magnitude. Surfaces with large slopes or edges are particularly difficult to be recorded. Some measuring methods developed in our laboratory are compared and the range of applications are discussed. For polished and fine ground glass and metal surfaces a heterodyne profilometer with a vertical resolution of 0.5 nm, lateral resolution of 0.6 &#956;m, and large scanning length is discussed. The interferometer can be changed from single- to double-pass operation by rotation of a quarter-wave-plate. For rougher surfaces a profilometer of the photometric-balance type with resolution Rq < 4 nm and dynamic range of 20 &#956;m and an interference microscope with automated fringe evaluation is described. An integral white light roughness sensor covers the roughness range 0.04&#956;m to 10&#956;m and measures independently mean roughness and autocorrelation width.
Appears in Collections:07 Fakultät Konstruktions-, Produktions- und Fahrzeugtechnik

Files in This Item:
File Description SizeFormat 
tiz83.pdf1,6 MBAdobe PDFView/Open


Items in OPUS are protected by copyright, with all rights reserved, unless otherwise indicated.