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http://dx.doi.org/10.18419/opus-4391
Autor(en): | Fischer, Edgar Dalhoff, Ernst Ittner, Thomas Kreuz, Silke Tiziani, Hans J. |
Titel: | Two wavelength heterodyne absolute ranging technique using suppressed carrier modulation |
Erscheinungsdatum: | 1993 |
Dokumentart: | Konferenzbeitrag |
Erschienen in: | Optics as a key to high technology. T. 2. Bellingham, Wash. : SPIE, 1993 (Proceedings / SPIE 1983), S. 692-693 |
URI: | http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-61828 http://elib.uni-stuttgart.de/handle/11682/4408 http://dx.doi.org/10.18419/opus-4391 |
Zusammenfassung: | For interferometric distance measurements on rough surfaces multiple wavelength interferometry is a powerful tool. It allows to reduce the sensitivity and to extend the range of unambiguity for interferometric measurement. A new kind of a double wavelength heterodyne interferometer is presented which uses only one laser source which generates two wavelengths λ 1 and λ 2 simultaneously. The two different heterodyne frequency shifts of the double heterodyne interferometer (DHI) are achieved by combining an acousto-optical modulator (driven in suppressed carrier mode) with a fixed diffraction grating. In a first prototype a multi-wavelength HeNe laser was used as light source. The synthetic wavelength λ in this system is 55.5 μm and the resolution about 0.15 μm. Measurement results obtained with the setup described are presented. |
Enthalten in den Sammlungen: | 07 Fakultät Konstruktions-, Produktions- und Fahrzeugtechnik |
Dateien zu dieser Ressource:
Datei | Beschreibung | Größe | Format | |
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tiz130.pdf | 453,38 kB | Adobe PDF | Öffnen/Anzeigen |
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