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Authors: Tiziani, Hans J.
Uhde, Hans-Martin
Title: Three-dimensional analysis by a microlens-array confocal arrangement
Issue Date: 1994 Zeitschriftenartikel Applied optics 33 (1994), S. 567-572. URL
Abstract: Scanning confocal microscopy is now well developed and applied. As an alternative to a laser spot to be scanned, parallel processing can be obtained when a two-dimensional structure is moved through the focal plane and a series of image sections is recorded. Surface topography is determined by analysis of the normalized intensity of the appropriate image points, i.e., a search of the intensity maximum leads to surface coordinates. With a high numerical aperture of the optical system, the half-width of I (z) is small, and the topography can be calculated with high accuracy. But with a high numerical aperture, only small object fields can be reproduced. As an alternative to the Nipkow disk for parallel processing, high-numerical-aperture microlenses are combined in an array. The reproducible object field is then limited by the size of the array and the number of lens and detector elements.
Appears in Collections:07 Fakultät Konstruktions-, Produktions- und Fahrzeugtechnik

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