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http://dx.doi.org/10.18419/opus-4411
Autor(en): | Tiziani, Hans J. Uhde, Hans-Martin |
Titel: | Three-dimensional analysis by a microlens-array confocal arrangement |
Erscheinungsdatum: | 1994 |
Dokumentart: | Zeitschriftenartikel |
Erschienen in: | Applied optics 33 (1994), S. 567-572. URL http://dx.doi.org./10.1364/AO.33.000567 |
URI: | http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-62098 http://elib.uni-stuttgart.de/handle/11682/4428 http://dx.doi.org/10.18419/opus-4411 |
Zusammenfassung: | Scanning confocal microscopy is now well developed and applied. As an alternative to a laser spot to be scanned, parallel processing can be obtained when a two-dimensional structure is moved through the focal plane and a series of image sections is recorded. Surface topography is determined by analysis of the normalized intensity of the appropriate image points, i.e., a search of the intensity maximum leads to surface coordinates. With a high numerical aperture of the optical system, the half-width of I (z) is small, and the topography can be calculated with high accuracy. But with a high numerical aperture, only small object fields can be reproduced. As an alternative to the Nipkow disk for parallel processing, high-numerical-aperture microlenses are combined in an array. The reproducible object field is then limited by the size of the array and the number of lens and detector elements. |
Enthalten in den Sammlungen: | 07 Fakultät Konstruktions-, Produktions- und Fahrzeugtechnik |
Dateien zu dieser Ressource:
Datei | Beschreibung | Größe | Format | |
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tiz147.pdf | 1,63 MB | Adobe PDF | Öffnen/Anzeigen |
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