05 Fakultät Informatik, Elektrotechnik und Informationstechnik
Permanent URI for this collectionhttps://elib.uni-stuttgart.de/handle/11682/6
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Item Open Access Unified model for laser doping of silicon from precursors(2021) Hassan, Mohamed; Dahlinger, Morris; Köhler, Jürgen R.; Zapf-Gottwick, Renate; Werner, Jürgen H.Laser doping of silicon with the help of precursors is well established in photovoltaics. Upon illumination with the constant or pulsed laser beam, the silicon melts and doping atoms from the doping precursor diffuse into the melted silicon. With the proper laser parameters, after resolidification, the silicon is doped without any lattice defects. Depending on laser energy and on the kind of precursor, the precursor either melts or evaporates during the laser process. For high enough laser energies, even parts of the silicon’s surface evaporate. Here, we present a unified model and simulation program, which considers all these cases. We exemplify our model with experiments and simulations of laser doping from a boron oxide precursor layer. In contrast to previous models, we are able to predict not only the width and depth of the patterns on the deformed silicon surface but also the doping profiles over a wide range of laser energies. In addition, we also show that the diffusion of the boron atoms in the molten Si is boosted by a thermally induced convection in the silicon melt: the Gaussian intensity distribution of the laser beam increases the temperature-gradient-induced surface tension gradient, causing the molten Si to circulate by Marangoni convection. Laser pulse energy densities above H > 2.8 J/cm2 lead not only to evaporation of the precursor, but also to a partial evaporation of the molten silicon. Without considering the evaporation of Si, it is not possible to correctly predict the doping profiles for high laser energies. About 50% of the evaporated materials recondense and resolidify on the wafer surface. The recondensed material from each laser pulse forms a dopant source for the subsequent laser pulses.Item Open Access Laser activation for highly boron-doped passivated contacts(2023) Sharbaf Kalaghichi, Saman; Hoß, Jan; Zapf-Gottwick, Renate; Werner, Jürgen H.Passivated, selective contacts in silicon solar cells consist of a double layer of highly doped polycrystalline silicon (poly Si) and thin interfacial silicon dioxide (SiO2). This design concept allows for the highest efficiencies. Here, we report on a selective laser activation process, resulting in highly doped p++-type poly Si on top of the SiO2. In this double-layer structure, the p++-poly Si layer serves as a layer for transporting the generated holes from the bulk to a metal contact and, therefore, needs to be highly conductive for holes. High boron-doping of the poly Si layers is one approach to establish the desired high conductivity. In a laser activation step, a laser pulse melts the poly Si layer, and subsequent rapid cooling of the Si melt enables electrically active boron concentrations exceeding the solid solubility limit. In addition to the high conductivity, the high active boron concentration in the poly Si layer allows maskless patterning of p++-poly Si/SiO2 layers by providing an etch stop layer in the Si etchant solution, which results in a locally structured p++-poly Si/SiO2 after the etching process. The challenge in the laser activation technique is not to destroy the thin SiO2, which necessitates fine tuning of the laser process. In order to find the optimal processing window, we test laser pulse energy densities (Hp) in a broad range of 0.7 J/cm2 ≤ Hp ≤ 5 J/cm2 on poly Si layers with two different thicknesses dpoly Si,1 = 155 nm and dpoly Si,2 = 264 nm. Finally, the processing window 2.8 J/cm2≤ Hp ≤ 4 J/cm2 leads to the highest sheet conductance (Gsh) without destroying the SiO2 for both poly Si layer thicknesses. For both tested poly Si layers, the majority of the symmetric lifetime samples processed using these Hp achieve a good passivation quality with a high implied open circuit voltage (iVOC) and a low saturation current density (J0). The best sample achieves iVOC = 722 mV and J0 = 6.7 fA/cm2 per side. This low surface recombination current density, together with the accompanying measurements of the doping profiles, suggests that the SiO2 is not damaged during the laser process. We also observe that the passivation quality is independent of the tested poly Si layer thicknesses. The findings of this study show that laser-activated p++-poly Si/SiO2 are not only suitable for integration into advanced passivated contact solar cells, but also offer the possibility of maskless patterning of these stacks, substantially simplifying such solar cell production.Item Open Access Fourier spotting : a novel setup for single-color reflectometry(2022) Siegel, Johannes; Berner, Marcel; Werner, Jürgen H.; Proll, Günther; Fechner, Peter; Schubert, MarkusSingle-color reflectrometry is a sensitive and robust detection method in optical biosensor applications, for example for bioanalysis. It is based on the interference of reflected monochromatic radiation and is label free. We present a novel setup for single-color reflectometry based on the patented technology of Berner et al. from 2016. Tilting areas of micro-mirrors allow us to encode the optical reflection signal of an analyte and reference channel into a particular carrier frequency with the amplitude being proportional to the local reflection. Therefore, a single photodiode is sufficient to collect the signals from both channels simultaneously. A 180∘ phase shift in the tilt frequency of two calibrated micro-mirror areas leads to a superposition of the analyte and reference signal which enables an efficient reduction of the baseline offset and potential baseline offset drift. A performance test reveals that we are able to detect changes of the refractive index n down to Δn < 0.01 of saline solutions as regents. A further test validates the detection of heterogeneous binding interaction. This test compromises immobilized testosterone-bovine serum albumin on a three-dimensional layer of biopolymer as ligand and monoclonal anti-testosterone antibodies as analyte. Antibody/antigen binding induces a local growth of the biolayer and change in the refractive index, which is measured via the local change of the reflection. Reproducible measurements enable for the analysis of the binding kinetics by determining the affinity constant KA = 1.59 × 10- 7 M- 1. In summary, this work shows that the concept of differential Fourier spotting as novel setup for single-color reflectometry is suitable for reliable bioanalysis.Graphical AbstractItem Open Access Three-step process for efficient solar cells with boron-doped passivated contacts(2024) Sharbaf Kalaghichi, Saman; Hoß, Jan; Linke, Jonathan; Lange, Stefan; Werner, Jürgen H.Crystalline silicon (c-Si) solar cells with passivation stacks consisting of a polycrystalline silicon (poly-Si) layer and a thin interfacial silicon dioxide (SiO2) layer show high conversion efficiencies. Since the poly-Si layer in this structure acts as a carrier transport layer, high doping of the poly-Si layer is crucial for high conductivity and the efficient transport of charge carriers from the bulk to a metal contact. In this respect, conventional furnace-based high-temperature doping methods are limited by the solid solubility of the dopants in silicon. This limitation particularly affects p-type doping using boron. Previously, we showed that laser activation overcomes this limitation by melting the poly-Si layer, resulting in an active concentration beyond the solubility limit after crystallization. High electrically active boron concentrations ensure low contact resistivity at the (contact) metal/semiconductor interface and allow for the maskless patterning of the poly-Si layer by providing an etch-stop layer in an alkaline solution. However, the high doping concentration degrades during long high-temperature annealing steps. Here, we performed a test of the stability of such a high doping concentration under thermal stress. The active boron concentration shows only a minor reduction during SiNx:H deposition at a moderate temperature and a fast-firing step at a high temperature and with a short exposure time. However, for an annealing time 𝑡anneal = 30 min and an annealing temperature 600 °C ≤ 𝑇anneal ≤ 1000 °C, the high conductivity is significantly reduced, whereas a high passivation quality requires annealing in this range. We resolve this dilemma by introducing a second, healing laser reactivation step, which re-establishes the original high conductivity of the boron-doped poly-Si and does not degrade the passivation. After a thermal annealing temperature 𝑇anneal = 985 °C, the reactivated layers show high sheet conductance (Gsh) with Gsh = 24 mS sq and high passivation quality, with the implied open-circuit voltage (iVOC) reaching iVOC = 715 mV. Therefore, our novel three-step process consisting of laser activation, thermal annealing, and laser reactivation/healing is suitable for fabricating highly efficient solar cells with p++-poly-Si/SiO2 contact passivation layers.Item Open Access Pulsed laser porosification of silicon thin films(2016) Sämann, Christian; Köhler, Jürgen R.; Dahlinger, Morris; Schubert, Markus B.; Werner, Jürgen H.Item Open Access Solar cells with laser doped boron layers from atmospheric pressure chemical vapor deposition(2022) Zapf-Gottwick, Renate; Seren, Sven; Fernandez-Robledo, Susana; Wete, Evariste-Pasky; Schiliro, Matteo; Hassan, Mohamed; Mihailetchi, Valentin; Buck, Thomas; Kopecek, Radovan; Köhler, Jürgen; Werner, Jürgen H.We present laser-doped interdigitated back contact (IBC) solar cells with efficiencies of 23% on an area of 244 cm2 metallized by a screen-printed silver paste. Local laser doping is especially suited for processing IBC cells where a multitude of pn-junctions and base contacts lay side by side. The one-sided deposition of boron-doped precursor layers by atmospheric pressure chemical vapor deposition (APCVD) is a cost-effective method for the production of IBC cells without masking processes. The properties of the laser-doped silicon strongly depend on the precursor’s purity, thickness, and the total amount of boron dopants. Variations of the precursor in terms of thickness and boron content, and of the laser pulse energy density, can help to tailor the doping and sheet resistance. With saturation-current densities of 70 fA/cm2 at sheet resistances of 60 Ohm/sq, we reached maximum efficiencies of 23% with a relatively simple, industrial process for bifacial IBC-cells, with 70% bifaciality measured on the module level. The APCVD-layers were deposited with an inline lab-type system and a metal transport belt and, therefore, may have been slightly contaminated, limiting the efficiencies when compared to thermal-diffused boron doping. The use of an industrial APCVD system with a quartz glass transport system would achieve even higher efficiencies.Item Open Access How much photovoltaic efficiency is enough?(2022) Werner, Jürgen H.At present, the purchasing prices for silicon-based photovoltaic modules with 20% efficiency and more are between 20 and 40 EURct/Wp. These numbers correspond to 40 to 80 EUR/m2 and are in the same range as the mounting costs (material prices plus salaries) of such modules. Installers and operators of photovoltaic systems carefully balance the module and mounting costs when deciding among modules of different efficiencies. This contribution emulates the installer’s decision via a simple, analytical module mounting decision (Mo2De) model. A priori, the model, and the resulting conclusions are completely independent of the photovoltaically active material inside the modules. De facto, however, based on the present state (cost, efficiency, reliability, bankability, etc.) of modules fabricated from (single) crystalline Si cells, conclusions on other photovoltaic materials might also be drawn: On the one hand, the model suggests that lower-efficiency modules with efficiencies below 20% will be driven out of the market. Keeping in mind their installation costs, installers will ask for large discounts for lower-efficiency modules. Technologies based on organic semiconductors, CdTe, CIGS, and even multicrystalline Si, might not survive in the utility market, or in industrial and residential applications. Moreover, this 20% mark will soon reach 23%, and finally will stop at around 25% for the very best, large-area (square meter sized) commercial modules based on single crystalline silicon only. On the other hand, it also seems difficult for future higher-efficiency modules based on tandem/triple cells to compete with standard Si-based reference modules. Compared to their expected higher efficiency, the production costs of tandem/triple cell modules and, therefore, also their required markup in sales, might be too high. Depending on the mounting cost, the Mo2De-model predicts acceptable markup values of 1 EURct/Wp (for low mounting costs of around 10 EUR/m2) to 11 EURct/Wp (for high mounting costs of 100 EUR/m2) if the module efficiency increases from 23% to 30%. Therefore, a 23% to 24% module efficiency, which is possible with silicon cells alone, might be enough for many terrestrial photovoltaic applications.Item Open Access Sheet conductance of laser-doped layers using a Gaussian laser beam : an effective depth approximation(2024) Hassan, Mohamed; Werner, Jürgen H.Laser doping of silicon with pulsed and scanned laser beams is now well-established to obtain defect-free, doping profile tailored, and locally selectively doped regions with a high spatial resolution. Picking the correct laser parameters (pulse power, pulse shape, and scanning speed) impacts the depth and uniformity of the melted region geometry. This work performs laser doping on the surface of single crystalline silicon, using a pulsed and scanned laser profile with a Gaussian intensity distribution. A deposited boron oxide precursor layer serves as a doping source. Increasing the local inter-pulse distance xirrbetween subsequent pulses causes a quadratic decrease of the sheet conductance Gshof the doped surface layer. Here, we present a simple geometric model that explains all experimental findings. The quadratic dependence stems from the approximately parabolic shape of the individual melted regions directly after the laser beam has hit the Si surface. The sheet resistance depends critically on the intersection depth dchand the distance xirrof overlap between two subsequent, neighboring pulses. The intersection depth dchquadratically depends on the pulse distance xirrand therefore also on the scanning speed vscanof the laser. Finally, we present a simple model that reduces the complicated three dimensional, laterally inhomogeneous doping profile to an effective two-dimensional, homogeneously doped layer which varies its thickness with the scanning speed.